Essentially all sensor types used for reactive deposition (magnetron sputtering or evaporation) are geared towards direct or indirect gas and/or vapour composition analysis, monitoring and provision of feedback signals. On the basis of these feedback signals control signals for actuating devices (e.g. mass flow controllers and power supplies) are derived.
The following sensor technologies are currently available to use with FloTron™ systems:
- Optical monitoring (OM) sensor head based on a fast CCD spectrometer,
- Optical monitoring (OM) sensor head based on a photomultiplier tube and an interference band-pass filter,
- Remote plasma (RP) sensor head,
- Target voltage.
Note: such optical monitoring methods are often termed P.E.M. - Plasma Emission Monitoring.